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Reactive ion etching and plasma etching of tungsten

✍ Scribed by P. Verdonck; G. Brasseur; J. Swart

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 313 KB
Volume: 21
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(93)90084-i

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