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Study of interface state density and effective oxide charge in post-metallization annealed SiO2-SiC structures

✍ Scribed by Campi, J.; Yan Shi; Yanbin Luo; Feng Yan; Zhao, J.H.


Book ID
114537580
Publisher
IEEE
Year
1999
Tongue
English
Weight
250 KB
Volume
46
Category
Article
ISSN
0018-9383

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