Correlating macroscopic and nanoscale electrical modifications of SiO2/4H-SiC interfaces upon post-oxidation-annealing in N2O and POCl3

✍ Scribed by Swanson, L. K.; Fiorenza, P.; Giannazzo, F.; Frazzetto, A.; Roccaforte, F.

• Book ID: 117998595
• Publisher: American Institute of Physics
• Year: 2012
• Tongue: English
• Weight: 827 KB
• Volume: 101
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.4766175