Effects of post oxidation annealing on electrical and interface properties of high pressure water vapor oxidized SiO2/SiC metal-oxide-semiconductor capacitors

✍ Scribed by Selvi, K. Kalai; DasGupta, Nandita; Thirunavukkarasu, K.

• Book ID: 122902724
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 633 KB
• Volume: 531
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2012.12.018