๐”– Bobbio Scriptorium
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STUDY OF ELECTRICAL AND OPTICAL PROPERTIES OF Cu-ASSISTED AMORPHOUS CARBON THIN FILMS DEPOSITION BY DC MAGNETRON SPUTTERING

โœ Scribed by HASSANNIA, SARA; ELAHI, SEYED MOHAMMAD; BOOCHANI, ARASH


Book ID
121817458
Publisher
World Scientific Publishing Company
Year
2013
Tongue
English
Weight
792 KB
Volume
27
Category
Article
ISSN
0217-9849

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Mechanical properties of amorphous carbo
โœ Dong Li; Yip-Wah Chung; Ming-Show Wong; William D. Sproul ๐Ÿ“‚ Article ๐Ÿ“… 1995 ๐Ÿ› Springer US ๐ŸŒ English โš– 379 KB

Nanoindentation hardness and compressive stress in amorphous carbon nitride thin films prepared by unbalanced magnetron sputter-deposition were studied. The coating hardness and compressive stress were found to be strongly dependent on processing parameters such as substrate bias and nitrogen partia