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Electrical/Optical Properties of Thin Transparent Oxide Films Deposited Using DC Magnetron Sputtering

โœ Scribed by So, Byung Soo; Kim, Sung Moon; Pyo, Young Sin; Kim, Young Hwan; Hwang, Jin-Ha


Book ID
125492691
Publisher
Trans Tech Publications, Ltd.
Year
2004
Tongue
English
Weight
630 KB
Volume
449-452
Category
Article
ISSN
1662-9752

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The NiO x thin films were deposited by reactive dc-magnetron sputtering from a nickel metal target in Ar + O 2 with the relative O 2 content 5%. The as-deposited NiO x thin films could represent a two-component system comprising crystalline NiO particles dispersed in an amorphous Ni 2 O 3 . Decompos