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Study of boron nitride deposition process from diborane and ammonia gas mixtures

✍ Scribed by A Essafi; C Gomez-Aleixandre; JM Albella

Book ID
103467057
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
222 KB
Volume
45
Category
Article
ISSN
0042-207X

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