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Kinetics of Chemical Vapour Deposition of Boron Nitride from a Gas Mixture of Trimethylborazine, Ammonia, and Hydrogen at 900 to 1050 °C and 1 Bar Total Pressure

✍ Scribed by Jörg, A.; Neuschütz, D.; Zimmermann, E.


Book ID
120442556
Publisher
EDP Sciences
Year
1995
Weight
683 KB
Volume
05
Category
Article
ISSN
1155-4339

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