✦ LIBER ✦

Studies of CF 2 radical and O atom in oxygen/fluorocarbon plasmas by laser-induced fluorescence

✍ Scribed by Hayashi, S; Kawashima, K; Ozawa, N; Tsuboi, H; Tatsumi, T; Sekine, M

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Studies of atomic oxygen in O2+CF4 rf di

✍ Walkup, R. E.; Saenger, K. L.; Selwyn, G. S. 📂 Article 📅 1986 🏛 American Institute of Physics 🌐 English ⚖ 872 KB

Kinetics of F atoms and fluorocarbon rad

✍ Tserepi, A. 📂 Article 📅 1997 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 479 KB

Surface Reactivity of CF 2 Radicals Meas

✍ Mackie, Neil M.; Venturo, Vincent A.; Fisher, Ellen R. 📂 Article 📅 1997 🏛 American Chemical Society 🌐 English ⚖ 440 KB

Two-dimensional images of CF2 density in

✍ McMillin, B.K.; Zachariah, M.R. 📂 Article 📅 1996 🏛 IEEE 🌐 English ⚖ 324 KB

Photolysis of CF3O2CF3 in the presence o

✍ Richard Meller; Geert K. Moortgat 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 795 KB

Detection of SiH 2 radicals in an a-Si:H

✍ Heintze, M; Bauer, G H 📂 Article 📅 1995 🏛 Institute of Physics 🌐 English ⚖ 169 KB