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Two-dimensional images of CF2 density in CF4/Ar plasmas by laser-induced fluorescence in a GEC RF reference cell

โœ Scribed by McMillin, B.K.; Zachariah, M.R.


Book ID
117862734
Publisher
IEEE
Year
1996
Tongue
English
Weight
324 KB
Volume
24
Category
Article
ISSN
0093-3813

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