Studies of atomic oxygen in O2+CF4 rf discharges by two-photon laser-induced fluorescence and optical emission spectroscopy

✍ Scribed by Walkup, R. E.; Saenger, K. L.; Selwyn, G. S.

• Book ID: 118253086
• Publisher: American Institute of Physics
• Year: 1986
• Tongue: English
• Weight: 872 KB
• Volume: 84
• Category: Article
• ISSN: 0021-9606
• DOI: 10.1063/1.450339