✦ LIBER ✦
Measurement of electron densities by a microwave cavity method in 13.56-MHz RF plasmas of Ar, CF4, C2F6, and CHF3
✍ Scribed by M. Haverlag; G. M. W. Kroesen; T. H. J. Bisschops; F. J. de Hoog
- Book ID
- 105206087
- Publisher
- Springer
- Year
- 1991
- Tongue
- English
- Weight
- 492 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0272-4324
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