✦ LIBER ✦
Kinetics of F atoms and fluorocarbon radicals studied by threshold ionization mass spectrometry in a microwave CF[sub 4] plasma
✍ Scribed by Tserepi, A.
- Book ID
- 121751053
- Publisher
- AVS (American Vacuum Society)
- Year
- 1997
- Tongue
- English
- Weight
- 479 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0734-2101
- DOI
- 10.1116/1.580855
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