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Detection of SiH 2 radicals in an a-Si:H deposition plasma by laser-induced fluorescence

✍ Scribed by Heintze, M; Bauer, G H

Book ID: 120558198
Publisher: Institute of Physics
Year: 1995
Tongue: English
Weight: 169 KB
Volume: 28
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/28/12/012

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