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Laser-induced fluorescence detection and kinetics of SiH 2 radicals in Ar/H 2 /SiH 4 RF discharges

✍ Scribed by Hertl, Michael; Jolly, Jacques

Book ID
120558199
Publisher
Institute of Physics
Year
2000
Tongue
English
Weight
201 KB
Volume
33
Category
Article
ISSN
0022-3727

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