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Electron transport coefficients in SiH 4 and Si 2 H 6 in dc and rf fields

✍ Scribed by Shimada, T; Nakamura, Y; Petrovi, Z Lj; Makabe, T

Book ID
121421722
Publisher
Institute of Physics
Year
2003
Tongue
English
Weight
688 KB
Volume
36
Category
Article
ISSN
0022-3727

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High-resolution (0.05 eV) Si 2p pre-edge photoabsorption spectra of SiH,, SiD,, S&H6 and S&Ha have been recorded. The spectra show a large number of peaks due to Si 2pdRydberg transitions, along with rich vibrational structure. The spectrum of SiD4 has been very useful in determining the exact posit