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Kinetics and mechanisms of surface reactions in epitaxial growth of Si from SiH4 and Si2H6

✍ Scribed by S.M. Gates

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 550 KB
Volume: 120
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(92)90401-4

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