✦ LIBER ✦
Mechanism of Si polycrystalline growth on a Si3N4 substrate from SiH4/H2 at reduced pressures
✍ Scribed by R. Cadoret; F. Hottier
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 725 KB
- Volume
- 64
- Category
- Article
- ISSN
- 0022-0248
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