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Structure–Property Relationships of Amorphous Hydrogenated Silicon–Carbon Films Produced by Atomic Hydrogen–Induced CVD from a Single-Source Precursor

✍ Scribed by A. M. Wróbel; S. Wickramanayaka; K. Kitamura; Y. Nakanishi; Y. Hatanaka

Publisher
John Wiley and Sons
Year
2000
Tongue
English
Weight
505 KB
Volume
6
Category
Article
ISSN
0948-1907

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