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Structure stability of hydrogenated amorphous carbon film during thermal annealing

✍ Scribed by X.-M. Tang; J. Weber; S.N. Mikhailov; C. Müller; W. Hänni; H.E. Hintermann

Book ID: 115990858
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 394 KB
Volume: 185
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(95)00672-9

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