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Structure and chemistry of silicon nitride and silicon carbonitride thin films deposited from ethylsilazane in ammonia or hydrogen

✍ Scribed by Bae, Y. W.; Du, H.; Gallois, B.; Gonsalves, K. E.; Wilkens, B. J.

Book ID: 120189024
Publisher: American Chemical Society
Year: 1992
Tongue: English
Weight: 751 KB
Volume: 4
Category: Article
ISSN: 0897-4756
DOI: 10.1021/cm00020a044

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