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Structurally perfect silicon layers produced on sapphire by oxygen ion implantation

✍ Scribed by V. M. Vorotyntsev; E. L. Shobolov; V. A. Gerasimov

Book ID: 110167066
Publisher: SP MAIK Nauka/Interperiodica
Year: 2011
Tongue: English
Weight: 169 KB
Volume: 47
Category: Article
ISSN: 0020-1685
DOI: 10.1134/s0020168511060239

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