Silicon ion implantation for growing structurally perfect silicon layers on sapphire
β Scribed by V. M. Vorotyntsev; E. L. Shobolov; V. A. Gerasimov
- Book ID
- 111445104
- Publisher
- Springer
- Year
- 2011
- Tongue
- English
- Weight
- 198 KB
- Volume
- 45
- Category
- Article
- ISSN
- 1063-7826
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