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Structural, optical, and surface science studies of 4H-SiC epilayers grown by low pressure chemical vapor deposition

✍ Scribed by Z. C. Feng; A. Rohatgi; C. C. Tin; R. Hu; A. T. S. Wee; K. P. Se


Book ID
112820295
Publisher
Springer US
Year
1996
Tongue
English
Weight
645 KB
Volume
25
Category
Article
ISSN
0361-5235

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