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Surface morphology and optical properties of ZnO epilayers grown on Si(1 1 1) by metal organic chemical vapor deposition

โœ Scribed by S.C. Hung; P.J. Huang; C.E. Chan; W.Y. Uen; F. Ren; S.J. Pearton; T.N. Yang; C.C. Chiang; S.M. Lan; G.C. Chi

Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
528 KB
Volume
255
Category
Article
ISSN
0169-4332

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โœฆ Synopsis

O 2 were 17 mmol/min and 1100 mmol/min, respectively. A low temperature ZnO buffer layer was deposited at 200 8C for 15 min, to thicknesses of 10-150 nm. ZnO epilayers were grown at

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