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Structural macro-defects in 6H-SiC wafers

✍ Scribed by R.C. Glass; L.O. Kjellberg; V.F. Tsvetkov; J.E. Sundgren; E. Janzén

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 840 KB
Volume: 132
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(93)90078-b

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