Defect observation in SiC wafers by room-temperature photoluminescence mapping

✍ Scribed by E. Higashi; M. Tajima; N. Hoshino; T. Hayashi; H. Kinoshita; H. Shiomi; S. Matsumoto

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 305 KB
• Volume: 9
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/j.mssp.2006.01.007