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Structural analysis of 4H-SiC layers grown on 6H-SiC and 15R-SiC substrates

✍ Scribed by I.P. Nikitina; R.C. Glass; E. Janzén; N.B. Guseva; A.A. Mal'tsev

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 487 KB
Volume: 152
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(95)00091-7

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