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Structural investigations on low-frequency, low-temperature, plasma-deposited a-SiNx: H films

โœ Scribed by C. Monteil; B. Cros; R. Berjoan; J. Durand


Book ID
115988328
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
425 KB
Volume
151
Category
Article
ISSN
0022-3093

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