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AES microstructural investigations of low-temperature, low-frequency plasma-deposited a-SixC1−x:H films

✍ Scribed by E. Gat; B. Cros; R. Berjoan; J. Durand

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 615 KB
Volume: 64
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(93)90204-o

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