9539950 Low temperature deposition of SiO2 thin films on plastics as a hard coating using TEOS/O2-plasma 1: Keiichiro Sano (Shizuoka University Graduate School·Suzuki Motor Corporation), Shigekazu Hayashi, Masaya Nomura (Suzuki Motor Corporation), Sunil Wickramanayaka, Yoichiro Nakanishi, Yoshinóri Hatanaka (Shizuoka University Research Institute of Electronics)

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 160 KB
• Volume: 17
• Category: Article
• ISSN: 0389-4304
• DOI: 10.1016/0389-4304(96)83292-9