Low temperature SiNx:H films deposited by inductively coupled plasma for solar cell applications

✍ Scribed by Zhou, H.P.; Wei, D.Y.; Xu, L.X.; Guo, Y.N.; Xiao, S.Q.; Huang, S.Y.; Xu, S.

• Book ID: 118052867
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 784 KB
• Volume: 264
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2012.09.050