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Structural evolution and optical characterization in argon diluted Si:H thin films obtained by plasma enhanced chemical vapor deposition

✍ Scribed by Li, Zhi ;He, Jian ;Li, Wei ;Cai, Hai-hong ;Gong, Yu-guang ;Jiang, Ya-dong


Book ID
107507489
Publisher
Chinese Electronic Periodical Services
Year
2010
Tongue
English
Weight
811 KB
Volume
17
Category
Article
ISSN
1005-9784

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