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Structural differences between deuterated and hydrogenated silicon nitride/oxynitride

✍ Scribed by Shih, An; Yeh, Shin-Hung; Lee, Si-Chen; Yang, T. R.

Book ID: 120410184
Publisher: American Institute of Physics
Year: 2001
Tongue: English
Weight: 366 KB
Volume: 89
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1364645

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