✦ LIBER ✦

Hydrogen ion-implanted silicon nitride and silicon oxynitride films

✍ Scribed by Schalch, D. ;Scharmann, A. ;Wolfrat, R.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The role of hydrogen in silicon nitride

✍ Dirk Schalch; Arthur Scharmann; Robert Wolfrat 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 383 KB

Silicon nitride and oxynitride films pre

✍ V.A. Burdovitsin 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 317 KB

Hydrogenation of silicon nitride and sil

✍ Schalch, D. ;Scharniann, A. ;Wolffut, R. 📂 Article 📅 1987 🏛 John Wiley and Sons 🌐 English ⚖ 258 KB

Paramagnetic point defects in silicon ni

✍ William L. Warren; Jerzy Kanicki; Edward H. Poindexter 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 532 KB

Ion bombardment-induced mechanical stres

✍ W. A. P. Claassen 📂 Article 📅 1987 🏛 Springer 🌐 English ⚖ 802 KB

Properties of silicon nitride and silico

✍ Mirsch, S. ;Bauer, J. 📂 Article 📅 1974 🏛 John Wiley and Sons 🌐 English ⚖ 339 KB