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Correlations between ESR and photoluminescence in slightly hydrogenated silicon nitride

✍ Scribed by Savall, C; Bruyere, J C; Krautwurm, J

Book ID
121447321
Publisher
Institute of Physics
Year
1995
Tongue
English
Weight
444 KB
Volume
28
Category
Article
ISSN
0022-3727

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Correlation between structure and photol
Correlation between structure and photoluminescence in amorphous hydrogenated silicon nitride alloys
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As-deposited a-SiNx:H (0:1 Β‘ x Β‘ 0:9) thin ΓΏlms prepared by evaporation of silicon under a ow of nitrogen and hydrogen ions exhibit visible photoluminescence at room temperature without any posttreatment. The nitrogen concentration was determined by X-ray photoemission spectroscopy. The structural c