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Structural damage and defects created in SiO2 films by Ar ion implantation

✍ Scribed by B. Garrido; J. Samitier; S. Bota; C. Domínguez; J. Montserrat; J.R. Morante


Book ID
115990343
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
380 KB
Volume
187
Category
Article
ISSN
0022-3093

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