Structural and nuclear characterizations of defects created by noble gas implantation in silicon oxide

✍ Scribed by H. Assaf; E. Ntsoenzok; M.-F. Barthe; M.-O. Ruault; T. Sauvage; S. Ashok

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 332 KB
• Volume: 253
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2006.10.042