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Structural characterization of ultra-thin (0 0 1) silicon films bonded onto (0 0 1) silicon wafers:: a transmission electron microscopy study

✍ Scribed by K. Rousseau; J.L. Rouvière; F. Fournel; H. Moriceau

Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
300 KB
Volume
4
Category
Article
ISSN
1369-8001

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