✦ LIBER ✦

Structural characterisation of nitrogen ion implantation into silicon for sensor technology

✍ Scribed by A. Romano-Rodríguez; A. El-Hassani; J. Samitier; A. Pérez-Rodríguez; S. Martínez; J.R. Morante; J. Esteve; J. Montserrat

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The application of nitrogen ion implanta

✍ W.J.M.J. Josquin 📂 Article 📅 1983 🏛 Elsevier Science ⚖ 605 KB

Structural and electrical characterisati

✍ K. Horan; A. Lankinen; L. O’Reilly; N.S. Bennett; P.J. McNally; B.J. Sealy; N.E. 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 556 KB

Amorphous structures of silicon carbonit

✍ Manabu Ishimaru; Muneyuki Naito; Yoshihiko Hirotsu; Kurt E. Sickafus 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 146 KB

Formation of thin Si3N4 films by nitroge

✍ A.D. Yadav; M.C. Joshi 📂 Article 📅 1979 🏛 Elsevier Science 🌐 English ⚖ 228 KB

Formation of thin Si3N4 films by nitroge

✍ A.D. Yadav; M.C. Joshi 📂 Article 📅 1979 🏛 Elsevier Science 🌐 English ⚖ 30 KB

Ammonia plasma immersion ion implantatio

✍ K Volz; B Rauschenbach; C Klatt; W Ensinger 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 256 KB