Ammonia plasma immersion ion implantation into silicon: Composition and structure of the resulting silicon–nitrogen–hydrogen system

✍ Scribed by K Volz; B Rauschenbach; C Klatt; W Ensinger

• Book ID: 114171894
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 256 KB
• Volume: 166-167
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(99)00866-6