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Structural and mechanical properties of CNx thin films prepared by magnetron sputtering

✍ Scribed by Kurt, R.; Sanjines, R.; Karimi, A.; Lévy, F.

Book ID
122829646
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
340 KB
Volume
9
Category
Article
ISSN
0925-9635

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