๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

A study on the bonding structure and mechanical properties of magnetron sputtered CNx thin films

โœ Scribed by Laskarakis, A; Logothetidis, S; Charitidis, C; Gioti, M; Panayiotatos, Y; Handrea, M; Kautek, W

Book ID
122024084
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
148 KB
Volume
10
Category
Article
ISSN
0925-9635

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Composition, chemical bonding and mechan
Composition, chemical bonding and mechanical properties of magnetron sputtered CNx thin films at different substrate bias
โœ M. Gioti; S. Logothetidis; C. Charitidis; H. Lefakis ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 116 KB

## Nitrogenated amorphous carbon films (a-CN V ) were prepared by reactive magnetron sputtering at room temperature with different substrate bias voltage (ยป ) and N concentration in the plasma. In situ spectroscopic ellipsometry (SE) data analysis was used to monitor the composition and the film t