Composition, chemical bonding and mechan
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M. Gioti; S. Logothetidis; C. Charitidis; H. Lefakis
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Article
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1999
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Elsevier Science
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English
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## Nitrogenated amorphous carbon films (a-CN V ) were prepared by reactive magnetron sputtering at room temperature with different substrate bias voltage (ยป ) and N concentration in the plasma. In situ spectroscopic ellipsometry (SE) data analysis was used to monitor the composition and the film t