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The composition and bonding structure of CNx films and their influence on the mechanical properties

โœ Scribed by A.K.M.S Chowdhury; M Monclus; D.C Cameron; J Gilvarry; M.J Murphy; N.P Barradas; M.S.J Hashmi


Book ID
114086175
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
175 KB
Volume
308-309
Category
Article
ISSN
0040-6090

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## Nitrogenated amorphous carbon films (a-CN V ) were prepared by reactive magnetron sputtering at room temperature with different substrate bias voltage (ยป ) and N concentration in the plasma. In situ spectroscopic ellipsometry (SE) data analysis was used to monitor the composition and the film t