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Effects of substrate temperature on bonding structure and mechanical properties of amorphous carbon films

โœ Scribed by S. Chowdhury; M.T. Laugier; I.Z. Rahman

Book ID
114085731
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
246 KB
Volume
447-448
Category
Article
ISSN
0040-6090

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Effects of deposition temperature on the
Effects of deposition temperature on the structure of amorphous carbon nitride films
โœ M. Therasse; M. Benlahsen ๐Ÿ“‚ Article ๐Ÿ“… 2004 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 134 KB

Amorphous carbon nitride films (a-CN x ) were deposited on Si(100) under different rf power and at different substrate temperature T S using rf magnetron sputtering of a high-purity graphite target in pure nitrogen. IR absorption, Raman spectra, and residual stress measurements are used to character