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Structure and mechanical properties of PACVD fluorinated amorphous carbon films

✍ Scribed by C.E. Bottani; A. Lamperti; L. Nobili; P.M. Ossi


Book ID
108388640
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
123 KB
Volume
433
Category
Article
ISSN
0040-6090

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