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Effects of substrate temperature on physical properties of amorphous carbon film synthesized under atmospheric pressure

✍ Scribed by Takayuki Sakata; Hideyuki Kodama; Hidetaka Hayashi; Toshihisa Shimo; Tetsuya Suzuki

Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
467 KB
Volume
205
Category
Article
ISSN
0257-8972

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