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The Dependence of Electrical and Optical Properties of RF Sputtered Amorphous Silicon–Carbon Alloy Thin Films on Substrate Temperature and Hydrogen Flow Rate

✍ Scribed by Magafas, L. ;Georgoulas, N. ;Girginoudi, D. ;Thanailakis, A.

Publisher
John Wiley and Sons
Year
1991
Tongue
English
Weight
394 KB
Volume
126
Category
Article
ISSN
0031-8965

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