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The effects of beam energy and substrate temperature on the tribological properties of hard-carbon films on aluminum

✍ Scribed by R. Wei; P.J. Wilbur; A. Erdemir; F.M. Kustas

Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
911 KB
Volume
51
Category
Article
ISSN
0257-8972

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## Abstract ZnSe films were deposited on glass substrates keeping the substrate temperatures, at room temperature (RT), 75, 150 and 250 Β°C. The films have exhibited cubic structure oriented along the (111) direction. Both the crystallinity and the grain size increased with increasing deposition tem