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Structural and electrical characteristics of high-κ ErTixOy gate dielectrics on InGaZnO thin-film transistors

✍ Scribed by Chen, Fa-Hsyang; Her, Jim-Long; Shao, Yu-Hsuan; Li, Wei-Chen; Matsuda, Yasuhiro H.; Pan, Tung-Ming

Book ID: 122906999
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 929 KB
Volume: 539
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2013.04.139

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